In this study, we investigate the fabrication of periodically poled lithium niobate (PPLN) microdisk cavities on a chip. These resonators are fabricated from a PPLN film with a 16 $\mu$m poling period on insulator using conventional microfabrication techniques. The quality factor of the PPLN microdisk resonators with a 40-$\mu$m radius and a 700-nm thickness is 6.7$\times~10^{5}$. Second harmonic generation (SHG) with an efficiency of 2.2$\times~10^{-6}\rm{mW^{-1}}$ is demonstrated in the fabricated PPLN microdisks. The nonlinear conversion efficiency could be considerably enhanced by optimizing the period and pattern of the poled structure and by improving the cavity quality factors.
This work was supported by the National Natural Science Foundation of China (Grant Nos. 11734009, 11674181, 11774182, and 11674184), the 111 Project (Grant No. B07013), PCSIRT (Grant No. IRT_13R29) and CAS Interdisciplinary Innovation Team.
[1] Vahala K. J.. Nature, 2003, 424: 839-846 CrossRef PubMed ADS Google Scholar
[2] Arizmendi L.. phys. stat. sol. (a), 2004, 201: 253-283 CrossRef ADS Google Scholar
[3] Fürst J. U., Strekalov D. V., Elser D., Aiello A., Andersen U. L., Marquardt C., Leuchs G.. Phys. Rev. Lett., 2011, 106: 113901 CrossRef PubMed ADS arXiv Google Scholar
[4] F?rtsch M., Fürst J. U., Wittmann C., Strekalov D., Aiello A., Chekhova M. V., Silberhorn C., Leuchs G., Marquardt C.. Nat Commun, 2013, 4: 1818 CrossRef PubMed ADS arXiv Google Scholar
[5] Wang C., Zhang M., Stern B., Lipson M., Lon?ar M.. Opt. Express, 2018, 26: 1547 CrossRef ADS arXiv Google Scholar
[6] Bo F., Wang J., Cui J., Ozdemir S. K., Kong Y., Zhang G., Xu J., Yang L.. Adv. Mater., 2015, 27: 8075-8081 CrossRef PubMed Google Scholar
[7] Fürst J. U., Strekalov D. V., Elser D., Lassen M., Andersen U. L., Marquardt C., Leuchs G.. Phys. Rev. Lett., 2010, 104: 153901 CrossRef PubMed ADS arXiv Google Scholar
[8] Wang C., Burek M. J., Lin Z., Atikian H. A., Venkataraman V., Huang I. C., Stark P., Lon?ar M.. Opt. Express, 2014, 22: 30924 CrossRef ADS arXiv Google Scholar
[9] Lin J. T., Xu Y. X., Fang Z. W., Wang M., Wang N. W., Qiao L. L., Fang W., Cheng Y.. Sci. China-Phys. Mech. Astron., 2015, 58: 114209 CrossRef ADS arXiv Google Scholar
[10]
J. Moore, J. K. Douglas, I. W. Frank, T. A. Friedmann, R. Camacho, and M. Eichenfield, in
[11] Lin J., Xu Y., Ni J., Wang M., Fang Z., Qiao L., Fang W., Cheng Y.. Phys. Rev. Appl., 2016, 6: 014002 CrossRef ADS Google Scholar
[12] Luo R., Jiang H., Rogers S., Liang H., He Y., Lin Q.. Opt. Express, 2017, 25: 24531 CrossRef ADS Google Scholar
[13] Strekalov D. V., Kowligy A. S., Huang Y. P., Kumar P.. New J. Phys., 2014, 16: 053025 CrossRef ADS arXiv Google Scholar
[14] Hao Z., Wang J., Ma S., Mao W., Bo F., Gao F., Zhang G., Xu J.. Photon. Res., 2017, 5: 623 CrossRef Google Scholar
[15] Sasagawa K., Tsuchiya M.. Appl. Phys. Express, 2009, 2: 122401 CrossRef ADS Google Scholar
[16] Fürst J. U., Strekalov D. V., Elser D., Aiello A., Andersen U. L., Marquardt C., Leuchs G.. Phys. Rev. Lett., 2010, 105: 263904 CrossRef PubMed ADS arXiv Google Scholar
[17] Beckmann T., Linnenbank H., Steigerwald H., Sturman B., Haertle D., Buse K., Breunig I.. Phys. Rev. Lett., 2011, 106: 143903 CrossRef PubMed ADS arXiv Google Scholar
[18] Guarino A., Poberaj G., Rezzonico D., Degl'Innocenti R., Günter P.. Nat. Photon, 2007, 1: 407-410 CrossRef ADS arXiv Google Scholar
[19] Wang T. J., Chu C. H., Lin C. Y.. Opt. Lett., 2007, 32: 2777 CrossRef ADS Google Scholar
[20] Wang J., Bo F., Wan S., Li W., Gao F., Li J., Zhang G., Xu J.. Opt. Express, 2015, 23: 23072 CrossRef ADS Google Scholar
[21] Wang M., Xu Y., Fang Z., Liao Y., Wang P., Chu W., Qiao L., Lin J., Fang W., Cheng Y.. Opt. Express, 2017, 25: 124 CrossRef ADS arXiv Google Scholar
[22] Ilchenko V. S., Savchenkov A. A., Matsko A. B., Maleki L.. Phys. Rev. Lett., 2004, 92: 043903 CrossRef PubMed ADS Google Scholar
[23] Haertle D.. J. Opt., 2010, 12: 035202 CrossRef ADS Google Scholar
[24]
V. S. Ilchenko, A. B. Matsko, A. A. Savchenkov, and L. Maleki, J. Opt. Soc. Am. B
[25] Wang J., Zhu B., Hao Z., Bo F., Wang X., Gao F., Li Y., Zhang G., Xu J.. Opt. Express, 2016, 24: 21869 CrossRef ADS Google Scholar
[26] Jiang X., Shao L., Zhang S. X., Yi X., Wiersig J., Wang L., Gong Q., Lon?ar M., Yang L., Xiao Y. F.. Science, 2017, 358: 344-347 CrossRef PubMed ADS Google Scholar
Copyright 2019 Science China Press Co., Ltd. 科学大众杂志社有限责任公司 版权所有
京ICP备18024590号-1